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A chemical mechanical polishing (CMP) process planarizes a wafer by pressing it against a moving pad saturated with a slurry containing abrasive and chemical agents. Slurry generally consists of an abrasive material dispersed in a liquid.
The slurry is fed to a rotating polishing pad mounted on a wafer carrier. The polishing pad is used to polish the wafer. The wafer, on the other hand, is rotated on a platen that is rotated by a motor. The combination of pad rotation and the motion of the wafer results in the rubbing together of the wafer and the slurry at the wafer surface. The mechanical shearing action of the wafer rubbing against the slurry-soaked pad results in both chemical and abrasive reactions.
A variety of chemicals, including oxidizing agents, are added to the slurry to perform various specific functions. Oxidizing agents reduce the pH of the slurry, which in turn enhances the removal rate of material from the wafer surface. The chemistry of the reaction between the chemicals and the slurry is a complex balancing act between the chemical’s etch and the chemical’s passivating effects.
As device geometries shrink, the need for high polishing speed and uniformity has increased. The surface of the wafer is very uneven, making the flatness of the wafer critical to planarity. It is currently usual for the wafer to be polished until a final thickness, after which it undergoes a
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MicroRNAs (miRNAs) are non-coding RNAs that negatively regulate gene expression by binding to target mRNAs, mainly in cell development, apoptosis and cell cycle. The miR-183 is one of the identified miRNA that play a critical role in the progression of nephropathy. However, the role of miR-183 in podocyte apoptosis is still unclear. In the present study, we investigated the role of miR-183 in the regulation of podocytes apoptosis. After the inhibition of miR-183, podocytes apoptosis induced by high glucose was enhanced by the upregulation of Bcl-2, which can promote the phosphorylation of AKT and mTOR. Moreover, we found that Mcl-1, an anti-apoptotic protein, is a novel target of miR-183. The luciferase reporter assay confirmed this point, and further loss-of-function analysis showed that this finding was dependent on the 3′-untranslated region of Mcl-1. In conclusion, the results
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